SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, United States (Saturday 7 February 2015)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XX - The effect of femtosecond laser processing conditions on the properties of a polarization imaging filter inside a silica glass

Roth, Stephan; Nakata, Yoshiki; Neuenschwander, Beat; Xu, Xianfan; Yamada, Yuya; Ohfuchi, Takafumi; Sakakura, Masaaki; Shimotsuma, Yasuhiko; Fukuda, Naoaki; Miura, Kiyotaka; Takiya, Toshio

作者Roth, Stephan; Nakata, Yoshiki; Neuenschwander, Beat; Xu, Xianfan; Yamada, Yuya; Ohfuchi, Takafumi; Sakakura, Masaaki; Shimotsuma, Yasuhiko; Fukuda, Naoaki; Miura, Kiyotaka; Takiya, Toshio
卷第9350卷
印刷ISSN0277-786X
文件大小724.60KB
发表时间2015
DOI10.1117/12.2080706

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