Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology || Electrochemical Microsystem Technology
- 作者Bhattacharyya, Bijoy
- 文件大小1022.61KB
- 发表时间2015
- DOI10.1016/b978-0-323-32737-4.00011-6
- 页码205-217
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