Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology || Recent Advancements in EMM for Micro and Nanofabrication
- 作者Bhattacharyya, Bijoy
- 文件大小3785.33KB
- 发表时间2015
- DOI10.1016/b978-0-323-32737-4.00012-8
- 页码219-240
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