Preparation and characterization of lead zirconate titanate thick films prepared by chemical solution deposition for MEMS applications
- 期刊名称Ceramics International
- 作者Wang, Guangxu; Ren, Wei; Shi, Peng; Wu, Xiaoqing
- 卷第41卷
- 印刷ISSN0272-8842
- 文件大小849.53KB
- 发表时间2015-07
- DOI10.1016/j.ceramint.2015.03.254
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