Effect of aluminum addition on the surface step morphology of 4H–SiC grown from Si–Cr–C solution

Mitani, Takeshi; Komatsu, Naoyoshi; Takahashi, Tetsuo; Kato, Tomohisa; Harada, Shunta; Ujihara, Toru; Matsumoto, Yuji; Kurashige, Kazuhisa; Okumura, Hajime

期刊名称Journal of Crystal Growth
作者Mitani, Takeshi; Komatsu, Naoyoshi; Takahashi, Tetsuo; Kato, Tomohisa; Harada, Shunta; Ujihara, Toru; Matsumoto, Yuji; Kurashige, Kazuhisa; Okumura, Hajime
卷第423卷
印刷ISSN0022-0248
文件大小806.38KB
发表时间2015-08
DOI10.1016/j.jcrysgro.2015.04.032
页码45-49

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Effect of aluminum addition on the surface step morphology of 4H–SiC grown from Si–Cr–C solution