Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors
- 期刊名称Sensors
- 作者Filipovic, Lado; Selberherr, Siegfried
- 卷第15卷
- 期第4期
- 电子ISSN1424-8220
- 文件大小859.49KB
- 发表时间2015-03-25
- DOI10.3390/s150407206
- 页码7206-7227
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