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Thermal stability of AlN films prepared by ion beam assisted deposition

Thermal stability of AlN films prepared by ion beam assisted deposition

Meng, Jian-ping; Liu, Xiao-peng; Fu, Zhi-qiang; Wang, Xiao-jing; Hao, Lei
  • 期刊名称Applied Surface Science
  • 作者Meng, Jian-ping; Liu, Xiao-peng; Fu, Zhi-qiang; Wang, Xiao-jing; Hao, Lei
  • 卷第347卷
  • 印刷ISSN0169-4332
  • 文件大小2617.97KB
  • 发表时间2015-08
  • DOI10.1016/j.apsusc.2015.03.120
  • 页码109-115
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