Thermal stability of AlN films prepared by ion beam assisted deposition
Meng, Jian-ping; Liu, Xiao-peng; Fu, Zhi-qiang; Wang, Xiao-jing; Hao, Lei
- 期刊名称Applied Surface Science
- 作者Meng, Jian-ping; Liu, Xiao-peng; Fu, Zhi-qiang; Wang, Xiao-jing; Hao, Lei
- 卷第347卷
- 印刷ISSN0169-4332
- 文件大小2617.97KB
- 发表时间2015-08
- DOI10.1016/j.apsusc.2015.03.120
- 页码109-115