Nano-patterning on soluble block copolymer polyimide by nanoimprint
Suzuki, Kenta; Youn, Sung-Won; Hiroshima, Hiroshi; Takagi, Hideki
- 期刊名称Japanese Journal of Applied Physics
- 作者Suzuki, Kenta; Youn, Sung-Won; Hiroshima, Hiroshi; Takagi, Hideki
- 卷第54卷
- 期第8期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小777.39KB
- 发表时间2015-08-01
- DOI10.7567/JJAP.54.088002