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Change in Surface Morphology by Addition of Impurity Elements in 4H-SiC Solution Growth with Si Solvent

Change in Surface Morphology by Addition of Impurity Elements in 4H-SiC Solution Growth with Si Solvent

Komatsu, Naoyoshi; Mitani, Takeshi; Takahashi, Tetsuo; Kato, Tomohisa; Kurashige, Kazuhisa; Matsumoto, Yuji; Ujihara, Toru; Okumura, Hajime
  • 期刊名称Materials Science Forum
  • 作者Komatsu, Naoyoshi; Mitani, Takeshi; Takahashi, Tetsuo; Kato, Tomohisa; Kurashige, Kazuhisa; Matsumoto, Yuji; Ujihara, Toru; Okumura, Hajime
  • 电子ISSN1662-9752
  • 文件大小2770.50KB
  • 发表时间2015-6
  • DOI10.4028/www.scientific.net/MSF.821-823.14
  • 页码14-17
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