Direction-identical scratching method for fabricating nanostructures using a modified AFM nanoscratching system

• 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
• 作者Geng, Yanquan; Yu, Bowen; Yan, Yongda; Hu, Zhenjiang; Zhao, Xuesen
• 卷第33卷
• 期第2期
• 印刷ISSN2166-2746
• 电子ISSN2166-2754
• 文件大小5213.60KB
• 发表时间2015-03
• DOI10.1116/1.4906790