Suppression of dark current in GeO_x-passivated germanium metal-semiconductor-metal photodetector by plasma post-oxidation
Kang, Jian; Zhang, Rui; Takenaka, Mitsuru; Takagi, Shinichi
- 期刊名称Optics Express
- 作者Kang, Jian; Zhang, Rui; Takenaka, Mitsuru; Takagi, Shinichi
- 卷第23卷
- 期第13期
- 电子ISSN1094-4087
- 文件大小1054.45KB
- 发表时间2015-06-29
- DOI10.1364/OE.23.016967