Deep-UV microsphere projection lithography
- 期刊名称Optics Letters
- 作者Bonakdar, Alireza; Rezaei, Mohsen; Brown, Robert L.; Fathipour, Vala; Dexheimer, Eric; Jang, Sung Jun; Mohseni, Hooman
- 卷第40卷
- 期第11期
- 印刷ISSN0146-9592
- 电子ISSN1539-4794
- 文件大小481.10KB
- 发表时间2015-06-01
- DOI10.1364/OL.40.002537
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