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Mechanical and tribological properties of CrN/TiN superlattice coatings deposited by a combination of arc-free deep oscillation magnetron sputtering with pulsed dc magnetron sputtering

Mechanical and tribological properties of CrN/TiN superlattice coatings deposited by a combination of arc-free deep oscillation magnetron sputtering with pulsed dc magnetron sputtering

Ou, Y.X.; Lin, J.; Che, H.L.; Moore, J.J.; Sproul, W.D.; Lei, M.K.

期刊名称Thin Solid Films
作者Ou, Y.X.; Lin, J.; Che, H.L.; Moore, J.J.; Sproul, W.D.; Lei, M.K.
印刷ISSN0040-6090
文件大小1160.90KB
发表时间2015-10
DOI10.1016/j.tsf.2015.09.067

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