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[IEEE 2015 IEEE SENSORS - Busan, South Korea (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - An ultra-high sensitivity Fabry-Perot acoustic pressure sensor using a multilayer suspended graphene diaphragm

[IEEE 2015 IEEE SENSORS - Busan, South Korea (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - An ultra-high sensitivity Fabry-Perot acoustic pressure sensor using a multilayer suspended graphene diaphragm

Cheng, Li; Qianwen, Liu; Tingting, Guo; Jun, Xiao; Shangchun, Fan; Wei, Jin

作者Cheng, Li; Qianwen, Liu; Tingting, Guo; Jun, Xiao; Shangchun, Fan; Wei, Jin
文件大小553.39KB
发表时间2015
DOI10.1109/ICSENS.2015.7370318
页码1-4

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