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[IEEE TENCON 2015 - 2015 IEEE Region 10 Conference - Macao (2015.11.1-2015.11.4)] TENCON 2015 - 2015 IEEE Region 10 Conference - Design and simulation of a novel 3D MEMS fabrication/micro cutting facility by thermally actuated MEMS device

[IEEE TENCON 2015 - 2015 IEEE Region 10 Conference - Macao (2015.11.1-2015.11.4)] TENCON 2015 - 2015 IEEE Region 10 Conference - Design and simulation of a novel 3D MEMS fabrication/micro cutting facility by thermally actuated MEMS device

Kashyap, Jatin; Nagesh, Samyuktha; Narayan, K.; Pattnaik, Prasant Kumar

作者Kashyap, Jatin; Nagesh, Samyuktha; Narayan, K.; Pattnaik, Prasant Kumar
文件大小389.04KB
发表时间2015
DOI10.1109/tencon.2015.7373004
页码1-4

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