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Technology for Fast Fabrication of Glass Microhotplates Based on the Laser Processing

Oblov, Konstantin; Ivanova, Anastasia; Soloviev, Sergey; Samotaev, Nikolay; Vasiliev, Alexey; Sokolov, Andrey

期刊名称Physics Procedia
作者Oblov, Konstantin; Ivanova, Anastasia; Soloviev, Sergey; Samotaev, Nikolay; Vasiliev, Alexey; Sokolov, Andrey
卷第72卷
印刷ISSN1875-3892
文件大小448.02KB
发表时间2015
DOI10.1016/j.phpro.2015.09.094
页码465-469