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Fabrication of Microhotplates Based on Laser Micromachining of Zirconium Oxide

Oblov, Konstantin; Ivanova, Anastasia; Soloviev, Sergey; Samotaev, Nikolay; Lipilin, Alexandr; Vasiliev, Alexey; Sokolov, Andrey

期刊名称Physics Procedia
作者Oblov, Konstantin; Ivanova, Anastasia; Soloviev, Sergey; Samotaev, Nikolay; Lipilin, Alexandr; Vasiliev, Alexey; Sokolov, Andrey
卷第72卷
印刷ISSN1875-3892
文件大小557.22KB
发表时间2015
DOI10.1016/j.phpro.2015.09.057
页码485-489