Electrical contact performance of MEMS acceleration switch fabricated by UV-LIGA technology
- 期刊名称Microsystem Technologies
- 作者Zhou, Zhijian; Nie, Weirong; Xi, Zhanwen; Wang, Xiaofeng
- 卷第21卷
- 期第10期
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小1280.33KB
- 发表时间2015-10
- DOI10.1007/s00542-015-2621-5
- 页码2271-2278
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