Effect of Crystallographic Quality of Grain Boundaries on Both Mechanical and Electrical Properties of Electroplated Copper Thin Film Interconnections
- 期刊名称Journal of Electronic Packaging
- 作者Murata, Naokazu; Saito, Naoki; Tamakawa, Kinji; Suzuki, Ken; Miura, Hideo
- 卷第137卷
- 期第3期
- 印刷ISSN1043-7398
- 文件大小5352.98KB
- 发表时间2015-09-01
- DOI10.1115/1.4029931
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