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Comparison of phosphorus gettering effect in faceted dendrite and small grain of multicrystalline silicon wafers grown by floating cast method

Comparison of phosphorus gettering effect in faceted dendrite and small grain of multicrystalline silicon wafers grown by floating cast method

Joonwichien, Supawan; Takahashi, Isao; Matsushima, Satoru; Usami, Noritaka

期刊名称Japanese Journal of Applied Physics
作者Joonwichien, Supawan; Takahashi, Isao; Matsushima, Satoru; Usami, Noritaka
卷第54卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小1746.62KB
发表时间2015-08-01
DOI10.7567/JJAP.54.08KD11

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