Survey of Questionnaire on Ultra-precision Positioning
- 期刊名称Journal of the Japan Society for Precision Engineering
- 作者OIWA, Takaaki; KATSUKI, Masahide
- 卷第81卷
- 期第10期
- 印刷ISSN0912-0289
- 电子ISSN1882-675X
- 文件大小2665.32KB
- 发表时间2015
- DOI10.2493/jjspe.81.904
- 页码904-910
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