Detection and Prevention of Palladium Contamination in Silicon Devices
- 期刊名称Solid State Phenomena
- 作者Polignano, Maria Luisa; Mica, Isabella; Brambilla, Agostino; Brambilla, Claudio; Brambilla, Simona; Ceresoli, Monica; Codegoni, Davide; Farini, Laura; Somaini, Francesco
- 卷第242卷
- 电子ISSN1662-9779
- 文件大小1208.18KB
- 发表时间2015-10
- DOI10.4028/www.scientific.net/ssp.242.252
- 页码252-257
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