Deionization of Dopants in Silicon Nanofilms Even with Donor Concentration of Greater than 10
19
cm
–3
Tanaka, Takahisa; Kurosawa, Yuya; Kadotani, Naotoshi; Takahashi, Tsunaki; Oda, Shunri; Uchida, Ken
- 期刊名称Nano Letters
- 作者Tanaka, Takahisa; Kurosawa, Yuya; Kadotani, Naotoshi; Takahashi, Tsunaki; Oda, Shunri; Uchida, Ken
- 印刷ISSN1530-6984
- 电子ISSN1530-6992
- 文件大小1988.00KB
- 发表时间2016-01-11
- DOI10.1021/acs.nanolett.5b04406