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Electrically charged selectivity of poly-para-xylylene deposition

Electrically charged selectivity of poly-para-xylylene deposition

Wu, Chih-Yu; Sun, Ho-Yi; Liang, Wei-Chieh; Hsu, Hung-Lun; Ho, Hsin-Ying; Chen, Yu-Ming; Chen, Hsien-Yeh
  • 期刊名称Chem. Commun.
  • 作者Wu, Chih-Yu; Sun, Ho-Yi; Liang, Wei-Chieh; Hsu, Hung-Lun; Ho, Hsin-Ying; Chen, Yu-Ming; Chen, Hsien-Yeh
  • 印刷ISSN1359-7345
  • 电子ISSN1364-548X
  • 文件大小1945.12KB
  • 发表时间2016
  • DOI10.1039/C5CC08059B
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