Electrically charged selectivity of poly-para-xylylene deposition
Wu, Chih-Yu; Sun, Ho-Yi; Liang, Wei-Chieh; Hsu, Hung-Lun; Ho, Hsin-Ying; Chen, Yu-Ming; Chen, Hsien-Yeh
- 期刊名称Chem. Commun.
- 作者Wu, Chih-Yu; Sun, Ho-Yi; Liang, Wei-Chieh; Hsu, Hung-Lun; Ho, Hsin-Ying; Chen, Yu-Ming; Chen, Hsien-Yeh
- 印刷ISSN1359-7345
- 电子ISSN1364-548X
- 文件大小1945.12KB
- 发表时间2016
- DOI10.1039/C5CC08059B