SPIE Proceedings [SPIE Seventh International Symposium on Precision Mechanical Measurements - Xia'men, China (Saturday 8 August 2015)] Seventh International Symposium on Precision Mechanical Measurements - High-resolution diffraction grating interferometric transducer of linear displacements
- 作者Yu, Liandong; Jin, Guofan; Ye, Shenghua; Fei, Yetai; Shang, Ping; Xia, Haojie; Fei, Yetai
- 卷第9903卷
- 印刷ISSN0277-786X
- 文件大小334.73KB
- 发表时间2016
- DOI10.1117/12.2212280
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