Electrothermal Characterization of Doped-Si Heated Microcantilevers Under Periodic Heating Operation
- 期刊名称Journal of Heat Transfer
- 作者Hamian, Sina; Gauffreau, Andrew M.; Walsh, Timothy; Lee, Jungchul; Park, Keunhan
- 卷第138卷
- 期第5期
- 印刷ISSN0022-1481
- 文件大小1854.56KB
- 发表时间2016-02-09
- DOI10.1115/1.4032531
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