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Integrated monolithic 3D MEMS scanner for switchable real time vertical/horizontal cross-sectional imaging

Li, Haijun; Duan, Xiyu; Qiu, Zhen; Zhou, Quan; Kurabayashi, Katsuo; Oldham, Kenn R.; Wang, Thomas D.

期刊名称Optics Express
作者Li, Haijun; Duan, Xiyu; Qiu, Zhen; Zhou, Quan; Kurabayashi, Katsuo; Oldham, Kenn R.; Wang, Thomas D.
卷第24卷
期第3期
电子ISSN1094-4087
文件大小3874.31KB
发表时间2016-02-08
DOI10.1364/OE.24.002145