Layout pattern analysis using the Voronoi diagram of line segments

• 期刊名称Journal of Micro/Nanolithography, MEMS, and MOEMS
• 作者Dey, Sandeep Kumar; Cheilaris, Panagiotis; Gabrani, Maria; Papadopoulou, Evanthia
• 卷第15卷
• 期第1期
• 印刷ISSN1932-5150
• 文件大小1002.80KB
• 发表时间2016-02-17
• DOI10.1117/1.JMM.15.1.013504