Influence of molecular oxygen on iodine atoms production in an RF discharge
- 期刊名称Plasma Sources Science and Technology
- 作者Mikheyev, P A; Ufimtsev, N I; Demyanov, A V; Kochetov, I V; Azyazov, V N; Napartovich, A P
- 卷第25卷
- 期第3期
- 印刷ISSN0963-0252
- 电子ISSN1361-6595
- 文件大小1316.69KB
- 发表时间2016-06-01
- DOI10.1088/0963-0252/25/3/035027
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