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Effects of substrate temperature on the structural, optical and resistive switching properties of HfO2 films

Effects of substrate temperature on the structural, optical and resistive switching properties of HfO2 films

Du, Qianqian; Wang, Wenjun; Li, Shuhong; Zhang, Dong; Zheng, Wanquan
  • 期刊名称Thin Solid Films
  • 作者Du, Qianqian; Wang, Wenjun; Li, Shuhong; Zhang, Dong; Zheng, Wanquan
  • 卷第608卷
  • 印刷ISSN0040-6090
  • 文件大小1274.80KB
  • 发表时间2016-06
  • DOI10.1016/j.tsf.2016.04.016
  • 页码21-25
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