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Facile patterning silicon wafer by Rochow reaction over patterned Cu-based catalysts

Ren, Wenfeng; Wang, Yanhong; Zhang, Zailei; Tan, Qiangqiang; Zhong, Ziyi; Su, Fabing

期刊名称Applied Surface Science
作者Ren, Wenfeng; Wang, Yanhong; Zhang, Zailei; Tan, Qiangqiang; Zhong, Ziyi; Su, Fabing
卷第360卷
印刷ISSN0169-4332
文件大小2638.27KB
发表时间2016-01
DOI10.1016/j.apsusc.2015.10.233
页码192-197