SPIE Proceedings [SPIE SPIE OPTO - San Francisco, California, United States (Saturday 13 February 2016)] Optical Interconnects XVI - Bimorph actuators in thick SiO 2 for photonic alignment
- 作者Schröder, Henning; Chen, Ray T.; Wu, Kai; Peters, Tjitte-Jelte; Tichem, Marcel; Postma, Ferry; Prak, Albert; Wörhoff, Kerstin; Leinse, Arne
- 卷第9753卷
- 印刷ISSN0277-786X
- 文件大小1598.60KB
- 发表时间2016
- DOI10.1117/12.2209499
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