Characterization study on machining PMMA thin-film using AFM tip-based dynamic plowing lithography
Yan, Yongda; He, Yang; Geng, Yanquan; Hu, Zhenjiang; Zhao, Xuesen
- 期刊名称Scanning
- 作者Yan, Yongda; He, Yang; Geng, Yanquan; Hu, Zhenjiang; Zhao, Xuesen
- 印刷ISSN0161-0457
- 文件大小3289.36KB
- 发表时间2016-02
- DOI10.1002/sca.21308