Simulation of temperature distribution in hot filament chemical vapor deposition diamond films growth on SiC seals
- 期刊名称Journal of Shanghai Jiaotong University (Science)
- 作者Liu, Jianjin; Wang, Liang; Zhang, Jianguo; Shen, Bin; Sun, Fanghong
- 卷第21卷
- 期第5期
- 印刷ISSN1007-1172
- 电子ISSN1995-8188
- 文件大小1871.83KB
- 发表时间2016-10
- DOI10.1007/s12204-016-1760-x
- 页码541-547
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