[IEEE 2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Lviv - Polyana, Ukraine (2016.4.20-2016.4.24)] 2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Analytical modelling of bossed membrane
Maj, Cezary; Zajac, Piotr; Szermer, Michal; Melnyk, Mykhaylo; Napieralski, Andrzej; Lobur, Mykhaylo
- 作者Maj, Cezary; Zajac, Piotr; Szermer, Michal; Melnyk, Mykhaylo; Napieralski, Andrzej; Lobur, Mykhaylo
- 文件大小532.79KB
- 发表时间2016
- DOI10.1109/memstech.2016.7507508
- 页码12-15