Ultraviolet Nanoimprint Lithography in the Mixture of Condensable Gases with Different Vapor Pressures
- 期刊名称Journal of Photopolymer Science and Technology
- 作者Suzuki, Kenta; Youn, Sung-Won; Hiroshima, Hiroshi
- 卷第29卷
- 期第2期
- 印刷ISSN0914-9244
- 电子ISSN1349-6336
- 文件大小2202.15KB
- 发表时间2016
- DOI10.2494/photopolymer.29.181
- 页码181-187
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