Influence of residual carbon impurities in i-GaN layer on the performance of GaN-based p-i-n photodetectors

Li, Xiaojing; Zhao, Degang; Jiang, Desheng; Chen, Ping; Zhu, Jianjun; Liu, Zongshun; Le, Lingcong; Yang, Jing; He, Xiaoguang; Zhang, Liqun; Zhang, Shuming; Liu, Jianping; Yang, Hui

期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
作者Li, Xiaojing; Zhao, Degang; Jiang, Desheng; Chen, Ping; Zhu, Jianjun; Liu, Zongshun; Le, Lingcong; Yang, Jing; He, Xiaoguang; Zhang, Liqun; Zhang, Shuming; Liu, Jianping; Yang, Hui
卷第34卷
期第1期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小518.57KB
发表时间2016-01
DOI10.1116/1.4936882

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Influence of residual carbon impurities in i-GaN layer on the performance of GaN-based p-i-n photodetectors