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The influence of pressure and gas flow on size and morphology of titanium oxide nanoparticles synthesized by hollow cathode sputtering

Gunnarsson, Rickard; Pilch, Iris; Boyd, Robert D.; Brenning, Nils; Helmersson, Ulf

期刊名称Journal of Applied Physics
作者Gunnarsson, Rickard; Pilch, Iris; Boyd, Robert D.; Brenning, Nils; Helmersson, Ulf
卷第120卷
期第4期
印刷ISSN0021-8979
电子ISSN1089-7550
文件大小2943.74KB
发表时间2016-07-28
DOI10.1063/1.4959993