[IEEE 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Sendai, Japan (2016.4.17-2016.4.20)] 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Fabrication of through silicon via with highly phosphorus-doped polycrystalline Si plugs for driving an active-matrix nanocrystalline Si electron emitter array
- 作者Ikegami, Naokatsu; Yoshida, Takashi; Kojima, Akira; Miyaguchi, Hiroshi; Muroyama, Masanori; Yoshida, Shinya; Totsu, Kentaro; Koshida, Nobuyoshi; Esashi, Masayoshi
- 文件大小1317.01KB
- 发表时间2016
- DOI10.1109/NEMS.2016.7758318
- 页码578-582
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