Thermal transport and thermal stress in a molybdenum film–glass substrate system
- 期刊名称Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
- 作者Miao, Tingting; Ma, Weigang; Yan, Shen; Zhang, Xing; Kohno, Masamichi; Takata, Yasuyuki; Ikoma, Yoshifumi
- 卷第34卷
- 期第2期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小983.31KB
- 发表时间2016-03
- DOI10.1116/1.4941308
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