[IEEE 2016 IEEE Asia Pacific Conference on Circuits and Systems (APCCAS) - Jeju, South Korea (2016.10.25-2016.10.28)] 2016 IEEE Asia Pacific Conference on Circuits and Systems (APCCAS) - Manufacturability-aware mask assignment in multiple patterning lithography
Kohira, Yukihide; Takahashi, Atsushi; Matsui, Tomomi; Kodama, Chikaaki; Nojima, Shigeki; Tanaka, Satoshi
- 作者Kohira, Yukihide; Takahashi, Atsushi; Matsui, Tomomi; Kodama, Chikaaki; Nojima, Shigeki; Tanaka, Satoshi
- 文件大小117.31KB
- 发表时间2016
- DOI10.1109/APCCAS.2016.7804023
- 页码538-541