[The Minerals, Metals & Materials Series] Characterization of Minerals, Metals, and Materials 2017 || Advanced Ion Column Solution for Low Ion Damage Characterization and Ultra-Fine Process

Ikhmayies, Shadia; Li, Bowen; Carpenter, John S.; Li, JIan; Hwang, Jiann-Yang; Monteiro, Sergio Neves; Firrao, Donato; Zhang, Mingming; Peng, Zhiwei; Escobedo-Diaz, Juan P.; Bai, Chenguang; Kalay, Yunus Eren; Goswami, Ramasis; Kim, Jeongguk

作者Ikhmayies, Shadia; Li, Bowen; Carpenter, John S.; Li, JIan; Hwang, Jiann-Yang; Monteiro, Sergio Neves; Firrao, Donato; Zhang, Mingming; Peng, Zhiwei; Escobedo-Diaz, Juan P.; Bai, Chenguang; Kalay, Yunus Eren; Goswami, Ramasis; Kim, Jeongguk
文件大小3027.29KB
发表时间2017
DOI10.1007/978-3-319-51382-9_58
页码537-544

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[The Minerals, Metals & Materials Series] Characterization of Minerals, Metals, and Materials 2017 || Advanced Ion Column Solution for Low Ion Damage Characterization and Ultra-Fine Process