Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges
Pan, ChunRong; Zhou, MengChu; Qiao, Yan; Wu, NaiQi
- 期刊名称IEEE Transactions on Automation Science and Engineering
- 作者Pan, ChunRong; Zhou, MengChu; Qiao, Yan; Wu, NaiQi
- 印刷ISSN1545-5955
- 电子ISSN1558-3783
- 文件大小2480.75KB
- 发表时间2017
- DOI10.1109/TASE.2016.2642997
- 页码1-16