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Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges

Pan, ChunRong; Zhou, MengChu; Qiao, Yan; Wu, NaiQi
  • 期刊名称IEEE Transactions on Automation Science and Engineering
  • 作者Pan, ChunRong; Zhou, MengChu; Qiao, Yan; Wu, NaiQi
  • 印刷ISSN1545-5955
  • 电子ISSN1558-3783
  • 文件大小2480.75KB
  • 发表时间2017
  • DOI10.1109/TASE.2016.2642997
  • 页码1-16
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