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Epitaxial growth of Cu(001) thin films onto Si(001) using a single-step HiPIMS process

Cemin, Felipe; Lundin, Daniel; Furgeaud, Clarisse; Michel, Anny; Amiard, Guillaume; Minea, Tiberiu; Abadias, Gregory

期刊名称Scientific Reports
作者Cemin, Felipe; Lundin, Daniel; Furgeaud, Clarisse; Michel, Anny; Amiard, Guillaume; Minea, Tiberiu; Abadias, Gregory
卷第7卷
期第1期
电子ISSN2045-2322
文件大小2301.14KB
发表时间2017-12
DOI10.1038/s41598-017-01755-8