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Theoretical and finite element analysis of dynamic deformation in resonating micromirrors

Farrugia, Russell; Grech, Ivan; Camilleri, Duncan; Casha, Owen; Gatt, Edward; Micallef, Joseph

期刊名称Microsystem Technologies
作者Farrugia, Russell; Grech, Ivan; Camilleri, Duncan; Casha, Owen; Gatt, Edward; Micallef, Joseph
印刷ISSN0946-7076
电子ISSN1432-1858
文件大小2662.82KB
发表时间2017-2-28
DOI10.1007/s00542-017-3335-7