Preparation of rare earth CeO2 thin films using metal organic decomposition method for metal-oxide–semiconductor capacitors
- 期刊名称Journal of Materials Science: Materials in Electronics
- 作者Agrawal, Khushabu S.; Patil, Vilas S.; Khairnar, Anil G.; Mahajan, Ashok M.
- 印刷ISSN0957-4522
- 电子ISSN1573-482X
- 文件大小1082.35KB
- 发表时间2017-5-13
- DOI10.1007/s10854-017-7072-6
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