[IEEE 2017 IEEE 37th International Conference on Electronics and Nanotechnology (ELNANO) - Kyiv, Ukraine (2017.4.18-2017.4.20)] 2017 IEEE 37th International Conference on Electronics and Nanotechnology (ELNANO) - Si resistivity modification by H + irradiation
- 作者Vasiljev, A.; Kukharenko, O.; Kozonushchenko, O.; Kot, O.; Tolmachov, M.
- 文件大小424.30KB
- 发表时间2017
- DOI10.1109/ELNANO.2017.7939747
- 页码194-198
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