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Influence of nitrogen partial pressure on the microstructure and morphological properties of sputtered RuN coatings

Influence of nitrogen partial pressure on the microstructure and morphological properties of sputtered RuN coatings

Quintero, J. H.; Ospina, R.; Mello, A.; Escobar, D.; Restrepo-Parra, E.

期刊名称Surface and Interface Analysis
作者Quintero, J. H.; Ospina, R.; Mello, A.; Escobar, D.; Restrepo-Parra, E.
印刷ISSN0142-2421
文件大小559.16KB
发表时间2017-07-19
DOI10.1002/sia.6256

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