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Benefits of energetic ion bombardment for tailoring stress and microstructural evolution during growth of Cu thin films

Cemin, Felipe; Abadias, Gregory; Minea, Tiberiu; Furgeaud, Clarisse; Brisset, François; Solas, Denis; Lundin, Daniel

期刊名称Acta Materialia
作者Cemin, Felipe; Abadias, Gregory; Minea, Tiberiu; Furgeaud, Clarisse; Brisset, François; Solas, Denis; Lundin, Daniel
印刷ISSN1359-6454
文件大小2835.42KB
发表时间2017-9
DOI10.1016/j.actamat.2017.09.007