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Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films

Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films

Mironovich, K. V.; Mankelevich, Yu. A.; Voloshin, D. G.; Dagesyan, S. A.; Krivchenko, V. A.
  • 期刊名称Plasma Physics Reports
  • 作者Mironovich, K. V.; Mankelevich, Yu. A.; Voloshin, D. G.; Dagesyan, S. A.; Krivchenko, V. A.
  • 卷第43卷
  • 期第8期
  • 印刷ISSN1063-780X
  • 电子ISSN1562-6938
  • 文件大小1228.03KB
  • 发表时间2017-8
  • DOI10.1134/S1063780X17080098
  • 页码844-857
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