Simulation and optical spectroscopy of a DC discharge in a CH4/H2/N2 mixture during deposition of nanostructured carbon films
Mironovich, K. V.; Mankelevich, Yu. A.; Voloshin, D. G.; Dagesyan, S. A.; Krivchenko, V. A.
- 期刊名称Plasma Physics Reports
- 作者Mironovich, K. V.; Mankelevich, Yu. A.; Voloshin, D. G.; Dagesyan, S. A.; Krivchenko, V. A.
- 卷第43卷
- 期第8期
- 印刷ISSN1063-780X
- 电子ISSN1562-6938
- 文件大小1228.03KB
- 发表时间2017-8
- DOI10.1134/S1063780X17080098
- 页码844-857